Flatness Measurement in High Precision
The following assumes that the camera frame rate is 50fps as an example for calculation. In the height range of 50um, 200 frames are collected, theoretically 20ms, and 1 frame corresponds to 0.25um; but in fact, Windows is not a real-time operating system, and the camera image period T0 and grating scale readings are collected. The delay D0 is not a constant value at a constant speed, and there will be fluctuation t1 and delay d1 respectively.
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